TRION RIE System: Operating procedure

Trion RIE system has a flat panel display with touch screen interface allowing fingertip control of all process parameters.
Please wear the provided figure glove before using the touch screen (Do not touch the screen with out these figure protection).

1. The system should be in the standby mode before starting the process.
(If not contact Bill)
2. Select cancel from the touch screen.
3. Select Vent chamber.
4. Wait until the chamber is vented and the chamber lid opens.
5. Load your sample (Make sure to place the sample at the centre of the substrate holder in between the three Orings).

6. Select chamber close on the touch screen menu.
7. Wait till the chamber is closed and the system starts pump down.
8. Select exit from the touch screen.
9. Select Files from the touch screen.
10. Select a suitable recipe from the touch screen.
11. Input suitable process parameters like the gas flows, the required Pressure set, ICP power and RIE Powers , select exit (Use the existing recipe and modify each time you use, Do not save your own recipe).
12. Running the recipe.
You can run the recipe in Auto/Manual mode.
a) For Auto mode:
1. Select Auto mode from the touch screen.
2. Wait till the Process complete window appears.
3. Go to step (13).
b) For Manual mode:
1. Select Manual mode from the touch screen.
2. Select Vacuum on
3. Wait for few seconds.
4. Select Pressure on.
5. Wait for few seconds.
6. Select Gas on.
7. Wait until the Gas pressure reaches the set value.
8. Select RF on.
9. Wait till the required process time is elapsed.
10. Select RF off.
11. Select Exit.
13. Select Vent Chamber.
14. Wait till the chamber vents and the chamber lid opens.
15. Remove the samples from the chamber.
16. To continue the process with other samples go to step (5).
17. Select Chamber close.
18. Wait till the chamber is closed.
19. With in 60 seconds of the chamber close select standby mode.

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