SOP (Standard Operational Procedure) for CAIBE Machine
Initial points to remember before working on the machine.

a) Sign in the logbook and read the comments from the previous operator on any issues with the machine.
b) Check the water flow rate (should be more that 2.2 liters/min)

I. Initial Setup
1) Turn on the main power
2) Turn on the Fume Hood (if not already ON)
3) Turn ON the Argon and Nitrogen gas bottles.
4) Make sure the compressed air is set to about 60 PSI
5) Switch On Vaccutherm (If Fill is displayed, need to refill with Fluroinert coolant)

Basic Computer Commands:
a) Alt_X= To DOS menu
b) r= return to initial screen
c) Alt_M=to manual operation
d) Push Initialize system
Push Alt_M to go to Manual screen

II Chamber Pump Down.
1. Go to Chamber Pumps Screen
2. Close Turbo pump Purge
3. Transfer and Chamber gate valves must be closed
4. Turn Chamber Forepump ON
5. Open chamber foreline valve (Pump until less than 3.75 x10-1 Torr) TPR3
6. Turn On Chamber Turbopump and let it run for 15 min.
7. Close Chamber foreline valve
8. Open Chamber Bypass Valve and pump until less than 3.75 x 10-1 Torr
9. Close Chamber Bypass Valve
10. Open Chamber Foreline Valve, wait until Foreline pressure is less Than 3.75 x10-1 Torr
11. Switch On Chamber Turbopump and ….
12. Open chamber Gate Valve.
13. Pump until less than 10e-6 Torr.

III LoadLock Pump Down (Can be Pumped down while chamber pumping down)

1. Adhere the sample to the sample holder using vacuum grease.
2. Secure the sample holder in the loadlock chamber
3. Make sure the loadlock lid is seated well (especially at the hinges).
4. Turn ON the Loadlock Forepump.
5. Turn ON Loadlock forline
6. Pump Until less that 3.75 Torr.
7. Turn On Loadlock turbopump (Switch the electrical white wire on 2nd row and put in slot 5b(2nd slot of the 5 slots)

IV Transfer the sample
1. Go to Loadlock pumps screen.
2. Open the Transfer Gate Valve
3. Go to Table
4. Open Table (Release Hold)
5. Open View shutter with the black knob on the top of the chamber
6. Turn on the Chamber light and put heavy object on it.
7. Turn Off the room lights to see the transfer process.
8. Put in the transfer arm until it reaches the yellow tape (Make sure it is secure in the slot for the holder). DONOT FORCE
9. Close Table (Release Hold)
10. Unscrew the Transfer arm counter clockwise and move the arm all the way to the end.
11. Close view shutter, turn off the chamber light and turn on the room lights.
12. Close the Transfer gate valve.

V Edit Recipe
1. Go to main menu
2. Push standby
3. Push Edit
4. Push Edit Recipe
5. Use arrow keys to navigate the screen and set the parameters as required. (Check the log book to see the previous parameters)
6. Push Standby
7. Push Manual

VI Plasma Sparking
1. Switch on the 3 toggle switches on the back of the machine for the argon flow
2. Go to gas box screen
3. Push Gas ON
4. Go to argon
5. Increase Argon and Decrease Argon to desire amount
6. Push Manual
7. Allow the gas to cycle through and stabilize the pressure to about 5e-5 Torr.
8. Turn the magnet to at atleast ~1200 Gaus
9. Turn on Microwave to ~400 W, 2.45 kV or higher.
10. Look to see for plasma or else use the nitrogen purge valve (Green Push button located on the top of the monitor screen).
11. Turn on Accelerator and Beam after the plasma is ignited

VII Etching
1. Go to table screen
2. Push Tilt Table (this is will tilt the table to the angle set in the recipe,
Note: -----=0 and |=90
3. Go to main screen
4. Note: If using reactive gas operations section.
5. Go to Source screen.
6. Open shutter (starts the etching on the sample as set in the recipe)
7. Set the Magnet, Microwave, Accelerator, and Beam settings.
8. Scan cup (give the Current density at the center of the sample)
9. Note: Beam and accelerator increase as process continues)

VIII After Etch.
1. Go to source, close the shutter (should close automatically after the etch time)(make sure to turn off the accelerator and beam after the etch, else the shutter will be etched)
2. Turn OFF a) accelerating Voltage b) Beam c) Microwave (Note: Let the microwave intensity go to zero) then, d) Switch off the magnet.
3. Go to gas box
4. Push the Gas off button
5. Close the 3 switches on the back of the machine for the argon flow.
6. Go to Table screen
7. Push table Home
8. Go to main screen
9. Go to loadlock screen
10. Open transfer gate valve
11. Shut off the room lights, open view shutter, and turn ON chamber light.
12. Put transfer arm and c screw clockwise.
13. Go to table screen
14. Open table,
15. Take out sample out of the chamber
16. Close transfer gate valve.
17. Turnoff chamber light and switch on the room lights.

IX Shutdown
1. Go to load lock pumps
2. Turn off loadlock turbopump (wait for ~ 5 min for turbopump to spin down)
3. Undo the wire on the back
4. Close the loadlock forelien valve
5. Turnoff the loadlock forpump
6. Go to chamber pumps screen
7. Close the chamber gate valve
8. Switch off the chamber turbopump (note: If reactive gas use, open the chamber turbopurge for 2 min) wait for 10 min
9. Close the chamber foreline
10. Close the chamber forepump
11. Donot Turnoff the vacccutherm
12. Donot Turnoff the main power.
13. Turnoff the main power
14. Close the argon and nitrogen lines.

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