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MCFF > MFF > Equipment


Equipment

Go to Reservation Instructions

4 CAIBE ECR Etch
7 Trion ICP/RIE Etch
3 ARC Evaporation
5 Electron Beam
6 EVG Lithography
2 Sputter Tool - 8 inch
1 Sputter Tool - 6 inch

Reservation Instructions

  1. Click the Equipment Reservation Calendar link within the equipment page (opens in a new window).
  2. Click the DATE LINK for the event.
  3. NEW EVENT text: Name or Course.
  4. Choose a Category:
    • Course
    • Demo
    • Maintenance
    • Research
  5. POPUP window text: EMAIL + any other information.
  6. START TIME and END TIME: 3 hour maximum per event.
    (Limit: 3 hours per user in AM and 3 hours per user in PM.)
  7. Event must be added within two weeks.
  8. No repeat (periodic) events are permitted.
  9. Users can send an email notification to anyone about the event.
  10. CREATE EVENT
  11. Use the browser BACK button to return to the calendar.
  12. RELOAD or REFRESH the browser. You should see your event right away.
  13. Contact Bill Knudsen to change or cancel bookings.

Microfabrication Facility
Michigan Technological University
436 Minerals and Materials Building
1400 Townsend Drive
Houghton, MI 49931-1295
906 369-2662(voice)
906 487-2949 (fax)
William Knudsen, Director
wknudsen@mtu.edu

© 2006 Michigan Technological University

Michigan Technological University
is an equal opportunity educational institution / equal opportunity employer